Concepedia

M M Marcel Hemerik

MM

2

Publications

68

Citations

2

H-Index

2004

Active since

Affiliations

ASML (Netherlands)(Current)

M M Marcel Hemerik is an author at ASML (Netherlands) specializing in optical properties, instrumentation, and engineering.

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Publications per year

2004–2004

2

Publications

2

Full optical column characterization of DUV lithographic projection tools

Mark van de Kerkhof, Wim de Boeij, Haico Kok et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 58 citations

, , +26

Relevance of a Midinfrared Cavity Ring-Down Diagnostic in the Study of a Dusty<tex>$hboxSiH_4$</tex>Plasma

J. Remy, M M Marcel Hemerik, G. M. W. Kroesen et al. · IEEE Transactions on Plasma Science · 2004 · 10 citations

, , +16

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