Michael D. Hodge

High Power, Wideband Single Crystal XBAW Technology for sub-6 GHz Micro RF Filter Applications

Ramakrishna Vetury, Michael D. Hodge, J.B. Shealy · 2018 · 54 citations

Materials Engineering, Electrical Engineering, Pvd Ain Xbaw +13

Low loss, 3.7GHz wideband BAW filters, using high power single crystal AlN-on-SiC resonators

J.B. Shealy, Ramakrishna Vetury, Shawn R. Gibb et al. · 2017 · 48 citations

Aluminium Nitride, Engineering, Acoustic Metamaterial +16

Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon

Rossiny Beaucejour, Volker Roebisch, Abhay Kochhar et al. · Journal of Microelectromechanical Systems · 2022 · 48 citations

Materials Science, Materials Engineering, Aluminum Scandium Nitride +15

High rejection UNII 5.2GHz wideband bulk acoustic wave filters using undoped single crystal AlN-on-SiC resonators

Michael D. Hodge, Ramakrishna Vetury, Shawn R. Gibb et al. · 2017 · 27 citations

Engineering, Physics, Acoustic Metamaterial +6

Single crystal aluminum nitride film bulk acoustic resonators

James B. Shealy, J.B. Shealy, Pinal Patel et al. · 2016 · 16 citations

Engineering, Acoustic Metamaterial, Mechanical Engineering +17