Rossiny Beaucejour

Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon

Rossiny Beaucejour, Volker Roebisch, Abhay Kochhar et al. · Journal of Microelectromechanical Systems · 2022 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +17

Growth-microstructure-thermal property relations in AlN thin films

Yiwen Song, Chi Zhang, James Spencer Lundh et al. · Journal of Applied Physics · 2022 · 19 citations

Natural Sciences, Materials Science, Physics +17

Compensation of the Stress Gradient in Physical Vapor Deposited Al1−xScxN Films for Microelectromechanical Systems with Low Out-of-Plane Bending

Rossiny Beaucejour, Michael D’Agati, Kritank Kalyan et al. · Micromachines · 2022 · 13 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Aluminum scandium nitride films for piezoelectric transduction into silicon at gigahertz frequencies

Lisa Hackett, Michael Miller, Rossiny Beaucejour et al. · Applied Physics Letters · 2023 · 10 citations · Full text

Engineering, Electrical Engineering, Materials Science +17