Concepedia
Statistics
Publications
7
Citations
287
H-Index
Active since
2003
Affiliations
DEVCOM Army Research Laboratory(Current)
Pennsylvania State University
Indian Institute of Science Bangalore
Robert R. Benoit is an author at DEVCOM Army Research Laboratory specializing in materials science, piezoelectric materials, and engineering.
Publications per year
2003–2022
Passivation mechanisms in cryogenic SF<sub>6</sub>/O<sub>2</sub>etching process
Rémi Dussart, Mohamed Boufnichel, G. Marcos et al. · Journal of Micromechanics and Microengineering · 2003 · 106 citations
Engineering, Materials Engineering, Materials Science +17
A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)
Ajay Dangi, Christopher Cheng, Sumit Agrawal et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2019 · 70 citations · Full text
Engineering, Bioengineering, Biomedical Engineering +17
Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation
Christopher Cheng, Ajay Dangi, Liqiang Ren et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2019 · 34 citations · Full text
Natural Sciences, Mechanical Engineering, Physics +17
Advances in piezoelectric PZT-based RF MEMS components and systems
Robert R. Benoit, Ryan Q. Rudy, Jeffrey S. Pulskamp et al. · Journal of Micromechanics and Microengineering · 2017 · 30 citations
Engineering, Electrical Engineering, Materials Science +17
Piezoelectric RF MEMS Switches on Si-on-Sapphire Substrates
Robert R. Benoit, Ryan Q. Rudy, Jeffrey S. Pulskamp et al. · Journal of Microelectromechanical Systems · 2020 · 20 citations
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