Concepedia

K. G. Gaynullin

KG

Statistics

Publications

4

Citations

158

H-Index

4

Active since

2005

Affiliations

Sarov Institute of Physics and Technology(Current)

K. G. Gaynullin is an author at Sarov Institute of Physics and Technology specializing in materials engineering, materials science, and natural sciences.

Publications per year

2005–2007

4

Publications

4

A molecular dynamics investigation of fluorocarbon based layer-by-layer etching of silicon and SiO2

Shahid Rauf, T. Sparks, Peter L. G. Ventzek et al. · Journal of Applied Physics · 2007 · 88 citations

, , +17

Molecular-dynamics model of energetic fluorocarbon-ion bombardment on SiO2 I. Basic model and CF2+-ion etch characterization

A. V. Stengach, K. G. Gaynullin, Victoria Andino-Pavlovsky et al. · Journal of Applied Physics · 2005 · 31 citations

, , +17

A molecular dynamics model for the interaction of energetic ions with SiOCH low-κ dielectric

A. V. Stengach, K. G. Gaynullin, Victoria Andino-Pavlovsky et al. · Journal of Applied Physics · 2007 · 29 citations

, , +17

Molecular-dynamics model of energetic fluorocarbon-ion bombardment on SiO2. II. CFx+ (x=1, 2, 3) ion etch characterization

A. V. Stengach, K. G. Gaynullin, Victoria Andino-Pavlovsky et al. · Journal of Applied Physics · 2005 · 10 citations

, , +16

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