Concepedia

L. A. Suslov

LA

4

Publications

95

Citations

4

H-Index

2001

Active since

Affiliations

Institute for Physics of Microstructures(Current)

L. A. Suslov is an author at Institute for Physics of Microstructures specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

2001–2011

4

Publications

4

The microstructure and X-ray reflectivity of Mo/Si multilayers

S. S. Andreev, S. V. Gaponov, Markus Haidl et al. · Thin Solid Films · 2002 · 36 citations

, , +5

Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy

E. B. Kluenkov, Denis G. Raskin, L. A. Suslov · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2009 · 22 citations

, , +11

A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm

D. G. Volgunov, I. G. Zabrodin, B. A. Zakalov et al. · Bulletin of the Russian Academy of Sciences Physics · 2011 · 20 citations

Stress reduction of Mo/Si multilayer structures

S. S. Andreev, L. A. Suslov, A. N. Yablonsky et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2001 · 17 citations

, , +5

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