Markus Haidl

<title>Progress in Mo/Si multilayer coating technology for EUVL optics</title>

Eric Louis, Andrey Yakshin, Peter C. Goerts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 45 citations

Materials Science, Materials Engineering, Electrical Engineering +14

The microstructure and X-ray reflectivity of Mo/Si multilayers

S. S. Andreev, S. V. Gaponov, Markus Haidl et al. · Thin Solid Films · 2002 · 36 citations

Materials Science, Engineering, Surface Science +5

Mo/Si-multilayers for EUV applications prepared by Pulsed Laser Deposition (PLD)

St Braun, R. Dietsch, Markus Haidl et al. · Microelectronic Engineering · 2001 · 31 citations

Materials Engineering, Materials Science, Engineering +8

Peak and integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography

R. Stuik, E. Louis, Andrey Yakshin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 24 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Giant magnetoresistance of Co/Cu multilayers with and without Fe buffer layers

Carola Dorner, Markus Haidl, H. Hoffmann · Journal of Applied Physics · 1993 · 19 citations

Magnetic Properties, Engineering, Magnetic Resonance +19