D. L. Willenborg

Detection of thermal waves through optical reflectance

Allan Rosencwaig, Jon Opsal, William L. Smith et al. · Applied Physics Letters · 1985 · 379 citations

Optical Materials, Engineering, Sample Optical Reflectance +20

Thermal-wave detection and thin-film thickness measurements with laser beam deflection

Jon Opsal, Allan Rosencwaig, D. L. Willenborg · Applied Optics · 1983 · 238 citations

Optical Materials, Engineering, Mechanical Engineering +26

Ion implant monitoring with thermal wave technology

William L. Smith, Allan Rosencwaig, D. L. Willenborg · Applied Physics Letters · 1985 · 154 citations

Engineering, Low Dose, Microscopy +18

Thin-film thickness measurements with thermal waves

Allan Rosencwaig, Jon Opsal, D. L. Willenborg · Applied Physics Letters · 1983 · 122 citations

Thin Film Physics, Optical Materials, Thin-film Thickness Measurements +19

Beam profile reflectometry: A new technique for dielectric film measurements

Allan Rosencwaig, Jon Opsal, D. L. Willenborg et al. · Applied Physics Letters · 1992 · 54 citations

Optical Materials, Engineering, Optical Testing +18