Detection of thermal waves through optical reflectance

Allan Rosencwaig, Jon Opsal, William L. Smith, D. L. Willenborg

Applied Physics Letters · 1985 · 381 citations · 15 references

Concepts

Abstract

We show that thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature. Applications to the study of microelectronic materials are illustrated by an example of measuring the thickness of thin metal films.

References

15