Publication | Closed Access
Detection of thermal waves through optical reflectance
379
Citations
15
References
1985
Year
Optical MaterialsEngineeringSample Optical ReflectanceThermal RadiationOptical PropertiesThermal AnalysisReflectanceMaterials ScienceThin Metal FilmsPhysicsThermal ImagingThermographyNatural SciencesSpectroscopyMicroelectronic MaterialsApplied PhysicsTemperature MeasurementOptical ReflectanceThin FilmsThermal SensorOptoelectronicsInfrared ImagingThermal Property
We show that thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature. Applications to the study of microelectronic materials are illustrated by an example of measuring the thickness of thin metal films.
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