Concepedia

Henry Yun

HY

Statistics

Publications

2

Citations

23

H-Index

2

Active since

2009

Affiliations

Lawrence Berkeley National Laboratory(Current)

Henry Yun is an author at Lawrence Berkeley National Laboratory specializing in engineering, semiconductor devices, and chemical cleaning.

Publications per year

2009–2010

2

Publications

2

Particle removal challenges of EUV patterned masks for the sub-22nm HP node

Abbas Rastegar, Sean Eichenlaub, Arun John Kadaksham et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

, , +17

SEMATECH EUVL mask program status

Henry Yun, Frank Goodwin, Sungmin Huh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 11 citations

, , +9

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