Concepedia

Rikimaru Sakamoto

RS

Statistics

Publications

4

Citations

69

H-Index

4

Active since

2008

Affiliations

Nissan Chemical Corporation (Japan)(Current)

Rikimaru Sakamoto is an author at Nissan Chemical Corporation (Japan) specializing in materials science, thin films, and thin film lithography.

Publications per year

2008–2013

4

Publications

4

Dry development rinse process (DDRP) and material (DDRM) for novel pattern collapse free process

Rikimaru Sakamoto, Yasushi Sakaida, Bang-Ching Ho · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 22 citations

Engineering, Manufacturing Engineering, Materials Science +14

Backexposure Effect in Chemically Amplified Resist Process upon Exposure to Extreme Ultraviolet Radiation

Takahiro Kozawa, Seiichi Tagawa, Ryuji Ohnishi et al. · Japanese Journal of Applied Physics · 2011 · 22 citations

Natural Sciences, Electrical Engineering, Materials Science +12

The novel spin-on hard mask and ultrathin UL material for EUVL

Rikimaru Sakamoto, Hiroaki Yaguchi, Syuhei Shigaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +17

Organic Underlayers for EUV Lithography

Dougllas J. Guerrero, Carol Beaman, Rikimaru Sakamoto et al. · Journal of Photopolymer Science and Technology · 2008 · 10 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

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