Concepedia

Yasushi Sakaida

YS

Statistics

Publications

5

Citations

105

H-Index

5

Active since

2004

Affiliations

Nissan Chemical Corporation (Japan)(Current)

Yasushi Sakaida is an author at Nissan Chemical Corporation (Japan) specializing in materials science, polymer thin films, and polymer chemistry.

Publications per year

2004–2013

5

Publications

5

Study of Self Cross-Link Bottom Antireflective Coating and Gap Fill Materials for Sublimate Defect Reduction in ArF Lithography

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida · Japanese Journal of Applied Physics · 2007 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +17

Study of High Etch Rate Bottom Antireflective Coating and Gap Fill Materials Using Dextrin Derivatives in ArF Lithography

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida · Japanese Journal of Applied Physics · 2007 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +11

Dry development rinse process (DDRP) and material (DDRM) for novel pattern collapse free process

Rikimaru Sakamoto, Yasushi Sakaida, Bang-Ching Ho · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 22 citations

Engineering, Manufacturing Engineering, Materials Science +14

Gap Fill Materials Using Cyclodextrin Derivatives in ArF Lithography

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida et al. · Japanese Journal of Applied Physics · 2007 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +14

Developer-soluble gap fill materials for patterning metal trenches in via-first dual-damascene process

Mandar Bhave, Kevin Edwards, Carlton Washburn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +8

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