Concepedia

Tetsuya Shinjo

TS

Statistics

Publications

3

Citations

70

H-Index

3

Active since

2007

Affiliations

Nissan Chemical Corporation (Japan)(Current)

Tetsuya Shinjo is an author at Nissan Chemical Corporation (Japan) specializing in materials engineering, natural sciences, and materials science.

Publications per year

2007–2007

3

Publications

3

Study of Self Cross-Link Bottom Antireflective Coating and Gap Fill Materials for Sublimate Defect Reduction in ArF Lithography

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida · Japanese Journal of Applied Physics · 2007 · 27 citations

, , +17

Study of High Etch Rate Bottom Antireflective Coating and Gap Fill Materials Using Dextrin Derivatives in ArF Lithography

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida · Japanese Journal of Applied Physics · 2007 · 25 citations

, , +11

Gap Fill Materials Using Cyclodextrin Derivatives in ArF Lithography

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida et al. · Japanese Journal of Applied Physics · 2007 · 18 citations

, , +14

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