Uwe Muehle

Imaging modes for potential mapping in semiconductor devices by electron holography with improved lateral resolution

Jan Sickmann, Petr Formánek, Martin Linck et al. · Ultramicroscopy · 2010 · 30 citations

Semiconductors, Semiconductor Devices, Electrical Engineering +14

2D-mapping of dopant distribution in deep sub micron CMOS devices by electron holography using adapted FIB-preparation

Andreas Lenk, Hannes Lichte, Uwe Muehle · Microscopy · 2005 · 25 citations

Holography, Engineering, Electron-beam Lithography +20

Si amorphization by focused ion beam milling: Point defect model with dynamic BCA simulation and experimental validation

Jin Huang, Markus Loeffler, Uwe Muehle et al. · Ultramicroscopy · 2017 · 22 citations

Materials Engineering, Ion Implantation, Engineering +11

Ultra-thin ZrO2/SrO/ZrO2 insulating stacks for future dynamic random access memory capacitor applications

Steve Knebel, Milan Pešić, Kyuho Cho et al. · Journal of Applied Physics · 2015 · 20 citations · Full text

Materials Science, Materials Engineering, Electrical Engineering +10

<i>In situ</i> study on low-<i>k</i> interconnect time-dependent-dielectric-breakdown mechanisms

Kong Boon Yeap, Martin Gall, Zhongquan Liao et al. · Journal of Applied Physics · 2014 · 17 citations

Materials Science, Tddb Degradation, Electrical Engineering +14