Concepedia

Mayu Yamamura

MY

Statistics

Publications

4

Citations

92

H-Index

4

Active since

2019

Affiliations

Applied Materials (United States)(Current)

Mayu Yamamura is an author at Applied Materials (United States) specializing in engineering, surface finishing, and materials processing.

Publications per year

2019–2020

4

Publications

4

Investigation of the Impact of Pad Surface Texture from Different Pad Conditioners on the CMP Performance

Aniruddh J. Khanna, Mayu Yamamura, Veera Raghava Kakireddy et al. · ECS Journal of Solid State Science and Technology · 2020 · 32 citations

, , +17

Engineering Surface Texture of Pads for Improving CMP Performance of Sub-10 nm Nodes

Aniruddh J. Khanna, Veera Raghava Kakireddy, Jason Fung et al. · ECS Journal of Solid State Science and Technology · 2020 · 25 citations

, , +17

Impact of Pad Material Properties on CMP Performance for Sub-10nm Technologies

Aniruddh J. Khanna, Raghava Kakireddy, Puneet Jawali et al. · ECS Journal of Solid State Science and Technology · 2019 · 24 citations · Full text

, , +17

Methodology for pad conditioning sweep optimization for advanced nodes

Aniruddh J. Khanna, Puneet Jawali, Daniel Redfield et al. · Microelectronic Engineering · 2019 · 11 citations

, , +4

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