Concepedia

Aniruddh J. Khanna

AJ

12

Publications

260

Citations

11

H-Index

2009

Active since

Affiliations

University of Florida(Current)

Applied Materials (United States)

Aniruddh J. Khanna is an author at University of Florida specializing in engineering, material processing, and mechanical engineering.

Top concepts

EngineeringMaterial ScienceMaterial ProcessingMechanical EngineeringMicrostructureRheologyMicrofabricationSurface PolishingChemical Engineering3D Printing

Publications per year

2009–2020

12

Publications

12

Study of Agglomeration Behavior of Chemical Mechanical Polishing Slurry under Controlled Shear Environments

Aniruddh J. Khanna, Sushant Gupta, Purushottam Kumar et al. · ECS Journal of Solid State Science and Technology · 2018 · 40 citations

Engineering, Microscopy, Mechanical Engineering +22

Investigation of the Impact of Pad Surface Texture from Different Pad Conditioners on the CMP Performance

Aniruddh J. Khanna, Mayu Yamamura, Veera Raghava Kakireddy et al. · ECS Journal of Solid State Science and Technology · 2020 · 32 citations

Engineering, Cmp Performance, Mechanical Engineering +16

Method for Determining Stability of CMP Slurry

Aniruddh J. Khanna, Sushant Gupta, Purushottam Kumar et al. · ECS Journal of Solid State Science and Technology · 2018 · 29 citations

Engineering, Mechanical Engineering, Mineral Processing +20

Quantification of shear induced agglomeration in chemical mechanical polishing slurries under different chemical environments

Aniruddh J. Khanna, Sushant Gupta, Purushottam Kumar et al. · Microelectronic Engineering · 2019 · 27 citations

Materials Science, Chemical Engineering, Different Chemical Environments +7

Analysis of light out-coupling from microlens array

Purushottam Kumar, Aniruddh J. Khanna, S. Y. Son et al. · Optics Communications · 2011 · 25 citations

Photonics, Engineering, Physics +5

Rows per page

1–5 of 12