Aniruddh J. Khanna - Concepedia

Author

Aniruddh J. Khanna

University of Florida ORCID

Also Known As

Aniruddh J. Khanna, Aniruddh Jagdish Khanna, Aniruddh Khanna

Publications

276

Citations

H-Index

Concepts

All Affiliations

University of Florida Applied Materials (United States)

About

Aniruddh J. Khanna is an author at University of Florida specializing in engineering, material processing, and mechanical engineering.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	10	11	235
2	Chemical Engineering	4	4	93
3	Applied Physics	3	3	60
4	Computer Engineering	2	2	43
5	Chemistry	1	1	14

Aniruddh J. Khanna

Publications

260

Citations

H-Index

Page 1

	Year	Citations
Study of Agglomeration Behavior of Chemical Mechanical Polishing Slurry under Controlled Shear Environments Aniruddh J. Khanna, Sushant Gupta, Purushottam Kumar, ECS Journal of Solid State Science and Technology EngineeringMicroscopyMechanical EngineeringMicrorheologyShear Rate	2018	40
Investigation of the Impact of Pad Surface Texture from Different Pad Conditioners on the CMP Performance Aniruddh J. Khanna, Mayu Yamamura, Veera Raghava Kakireddy, ECS Journal of Solid State Science and Technology EngineeringCmp PerformanceMechanical EngineeringDifferent Pad ConditionersPad Surface Texture	2020	32
Method for Determining Stability of CMP Slurry Aniruddh J. Khanna, Sushant Gupta, Purushottam Kumar, ECS Journal of Solid State Science and Technology EngineeringMechanical EngineeringMineral ProcessingMechanics ModelingRheological Measurement	2018	29
Quantification of shear induced agglomeration in chemical mechanical polishing slurries under different chemical environments Aniruddh J. Khanna, Sushant Gupta, Purushottam Kumar, Microelectronic Engineering Materials ScienceChemical EngineeringDifferent Chemical EnvironmentsEngineeringMaterial Processing	2019	27
Analysis of light out-coupling from microlens array Purushottam Kumar, Aniruddh J. Khanna, S. Y. Son, Optics Communications PhotonicsEngineeringPhysicsOptical PropertiesMicrolens Array	2011	25
Engineering Surface Texture of Pads for Improving CMP Performance of Sub-10 nm Nodes Aniruddh J. Khanna, Veera Raghava Kakireddy, Jason Fung, ECS Journal of Solid State Science and Technology	2020	25
Impact of Pad Material Properties on CMP Performance for Sub-10nm Technologies Aniruddh J. Khanna, Raghava Kakireddy, Puneet Jawali, ECS Journal of Solid State Science and Technology Cmp PerformanceEngineeringMechanical EngineeringStorage ModulusPolishing Process	2019	23
Mn-Doped Zn2SiO4 Phosphors Synthesis Using Flame Spray Pyrolysis Jae Seok Lee, Myoung Hwan Oh, Purushottam Kumar, Journal of Thermal Spray Technology Inorganic ChemistryChemical EngineeringEngineeringChemistryInorganic Material	2011	14
Surface Shaping Using Chemical Mechanical Polishing Purushottam Kumar, S. Y. Son, Aniruddh J. Khanna, Journal of The Electrochemical Society EngineeringMechanical EngineeringCmp VariablesEdge RoundingUsing Chemical Mechanical	2011	12
Characterization of the nature of shear-induced agglomerates as hard and soft in chemical mechanical polishing slurries Aniruddh J. Khanna, Feng‐Chi Chang, Sushant Gupta, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena Materials ScienceAcidic Ph SlurryThixotropyEngineeringMaterial Processing	2019	12

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