Concepedia

Veera Raghava Kakireddy

VR

Statistics

Publications

3

Citations

72

H-Index

3

Active since

2008

Affiliations

Applied Materials (United States)(Current)

Veera Raghava Kakireddy is an author at Applied Materials (United States) specializing in surface polishing, microstructure, and engineering.

Top concepts

Publications per year

2008–2020

3

Publications

3

Investigation of the Impact of Pad Surface Texture from Different Pad Conditioners on the CMP Performance

Aniruddh J. Khanna, Mayu Yamamura, Veera Raghava Kakireddy et al. · ECS Journal of Solid State Science and Technology · 2020 · 32 citations

, , +16

Engineering Surface Texture of Pads for Improving CMP Performance of Sub-10 nm Nodes

Aniruddh J. Khanna, Veera Raghava Kakireddy, Jason Fung et al. · ECS Journal of Solid State Science and Technology · 2020 · 25 citations

Effect of temperature on copper damascene chemical mechanical polishing process

Veera Raghava Kakireddy, Subrahmanya R. Mudhivarthi, Ashok Kumar · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 15 citations

, , +17

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