M. Saitoh

Formation and observation of 50 nm polarized domains in PbZr1−<i>x</i>Ti<i>x</i>O3 thin film using scanning probe microscope

Takanori Hidaka, T. Maruyama, M. Saitoh et al. · Applied Physics Letters · 1996 · 222 citations

Probe Microscope, Engineering, Thin Film Process Technology +20

Characteristics of PZT thin films as ultra-high density recording media

Takanori Hidaka, T. Maruyama, Ikuo Sakai et al. · Integrated ferroelectrics · 1997 · 68 citations

Materials Engineering, Materials Science, Pzt Thin Films +15

Growth and characterization of 10-nm-thick <i>c</i>-axis oriented epitaxial PbZr0.25Ti0.75O3 thin films on (100)Si substrate

T. Maruyama, M. Saitoh, Ikuo Sakai et al. · Applied Physics Letters · 1998 · 62 citations

Materials Engineering, Materials Science, Electrical Engineering +15

Fine Pattern Etching of Molybdenum Thin Film and Silicon Substrate by Using Atmospheric Line-Shaped Microplasma Source

T. Okumura, M. Saitoh, Yoichiro Yashiro et al. · Japanese Journal of Applied Physics · 2003 · 17 citations

Engineering, Electron-beam Lithography, Fine Pattern +17

A micro active probe device compatible with SOI-CMOS technologies

You-Wen Yi, Y. Kondoh, Kazuki Ihara et al. · Journal of Microelectromechanical Systems · 1997 · 13 citations

Electrical Engineering, Engineering, Micromachines +15