Concepedia

Yoichiro Yashiro

YY

1

Publications

17

Citations

1

H-Index

2003

Active since

Affiliations

Panasonic (Japan)(Current)

Yoichiro Yashiro is an author at Panasonic (Japan) specializing in microfabrication, materials fabrication, and applied physics.

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Publications per year

2003–2003

1

Publications

1

Fine Pattern Etching of Molybdenum Thin Film and Silicon Substrate by Using Atmospheric Line-Shaped Microplasma Source

T. Okumura, M. Saitoh, Yoichiro Yashiro et al. · Japanese Journal of Applied Physics · 2003 · 17 citations

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