Concepedia

Author

Yoichiro Yashiro

Panasonic (Japan)

Also Known As

Y. Yashiro, Yoichiro Yashiro

2

Publications

17

Citations

1

H-Index

9

Concepts

All Affiliations

Panasonic (Japan)
YY

About

Yoichiro Yashiro is an author at Panasonic (Japan) specializing in microfabrication, materials fabrication, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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2

Applied Physics

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17

3

Chemical Engineering

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17

4

Materials Science

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17

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Materials Fabrication

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17

Yoichiro Yashiro

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1

Publications

17

Citations

1

H-Index

YearCitations

Fine Pattern Etching of Molybdenum Thin Film and Silicon Substrate by Using Atmospheric Line-Shaped Microplasma Source

T. Okumura, M. Saitoh, Yoichiro Yashiro,

Japanese Journal of Applied Physics

2003

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