Yasunari Sohda

Fabrication of arrayed glassy carbon field emitters

Yasunari Sohda, David M. Tanenbaum, Stephen W. Turner et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 20 citations

Materials Science, Electrical Engineering, Electronic Devices +15

Coulomb effect in cell projection lithography

Yasunari Sohda, Yasuhiro Someda, Norio Saitou et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 18 citations

Engineering, Electron-beam Lithography, Microscopy +18

Study of Measurement Condition Optimization in Critical Dimension-Scanning Electron Microscope

Keiichiro Hitomi, Yoshinori Nakayama, Hiromasa Yamanashi et al. · Japanese Journal of Applied Physics · 2008 · 18 citations

Engineering, Electron-beam Lithography, Microscopy +18

Study on Image Drift Induced by Charging during Observation by Scanning Electron Microscope

Nobuhiro Okai, Yasunari Sohda · Japanese Journal of Applied Physics · 2012 · 17 citations

Electrical Engineering, Image Drift Induced, Largest Image Drift +15

Recent progress in cell-projection electron-beam lithography

Yasunari Sohda, Hirofumi Ohta, Fabrício Murai et al. · Microelectronic Engineering · 2003 · 14 citations

Engineering, Electron-beam Lithography, Beam Lithography +5