Statistics
Publications
4
Citations
237
H-Index
4
Active since
1993
Affiliations
University of Minnesota(Current)
Kevin Dai is an author at University of Minnesota specializing in engineering, applied physics, and microfabrication.
Publications per year
1993–2022
4
4
10 nm Si pillars fabricated using electron-beam lithography, reactive ion etching, and HF etching
P. Fischer, Kevin Dai, Erli Chen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 52 citations
Optical Materials, Engineering, Electron-beam Lithography +19
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