Statistics
Publications
8
Citations
786
H-Index
8
Active since
1990
Affiliations
Erli Chen is an author at University of Minnesota specializing in engineering, applied physics, and optoelectronic devices.
Publications per year
1990–2023
8
8
Fabrication of 10 nm enclosed nanofluidic channels
Han Cao, Zhaoning Yu, Jian Wang et al. · Applied Physics Letters · 2002 · 323 citations
10 nm Si pillars fabricated using electron-beam lithography, reactive ion etching, and HF etching
P. Fischer, Kevin Dai, Erli Chen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 52 citations
Optical Materials, Engineering, Electron-beam Lithography +19
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