Statistics
Publications
5
Citations
144
H-Index
5
Active since
1976
Affiliations
Toshiba (Japan)(Current)
Masahiro Shibagaki is an author at Toshiba (Japan) specializing in materials science, etching processes, and surface science.
Publications per year
1976–1982
5
5
Yasuhiro Horiike, Masahiro Shibagaki · Japanese Journal of Applied Physics · 1976 · 53 citations · Full text
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