Concepedia

Takuji Sugawara

TS

1

Publications

25

Citations

1

H-Index

1981

Active since

Affiliations

Toshiba (Japan)(Current)

Takuji Sugawara is an author at Toshiba (Japan) specializing in plasma physics, surface science, and physics.

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Publications per year

1981–1981

1

Publications

1

Cl<sub>2</sub>/Ar Plasma Etching of a Contaminated Layer on Si Induced by Fluorocarbon Gas Plasma

Yasuhiro Horiike, Takuji Sugawara, H. Okano et al. · Japanese Journal of Applied Physics · 1981 · 25 citations

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