Concepedia

Atsushi Yabata

AY

Statistics

Publications

3

Citations

85

H-Index

3

Active since

1997

Affiliations

Oki Electric Industry (Japan)(Current)

Atsushi Yabata is an author at Oki Electric Industry (Japan) specializing in engineering, microfabrication, and microelectronics.

Top concepts

Publications per year

1997–2012

3

Publications

3

Characteristics of Very High-Aspect-Ratio Contact Hole Etching

Naokatsu Ikegami, Atsushi Yabata, Takayuki Matsui et al. · Japanese Journal of Applied Physics · 1997 · 50 citations

, , +15

Vertical Profile Control in Ultrahigh-Aspect-Ratio Contact Hole Etching with 0.05-µm-Diameter Range

Naokatsu Ikegami, Atsushi Yabata, Guo Lin Liu et al. · Japanese Journal of Applied Physics · 1998 · 21 citations

, , +16

Characterization of chip-level hetero-integration technology for high-speed, highly parallel 3D-stacked image processing system

Kyung-Woo Lee, Yuki Ohara, K. Kiyoyama et al. · 2012 · 14 citations

, , +20

1–3 of 3