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Guo Lin Liu

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Publications

1

Citations

21

H-Index

1

Active since

1998

Affiliations

Oki Electric Industry (Japan)(Current)

Guo Lin Liu is an author at Oki Electric Industry (Japan) specializing in applied physics, microelectronics, and mechanical engineering.

Top concepts

Publications per year

1998–1998

1

Publications

1

Vertical Profile Control in Ultrahigh-Aspect-Ratio Contact Hole Etching with 0.05-µm-Diameter Range

Naokatsu Ikegami, Atsushi Yabata, Guo Lin Liu et al. · Japanese Journal of Applied Physics · 1998 · 21 citations

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