Trey Graves is an author at KLA (United States) specializing in microelectronics, applied physics, and engineering.
Top concepts
EngineeringApplied PhysicsMicroelectronicsOptoelectronicsNatural SciencesOptical PropertiesPhysicsChemistry3D PrintingSpectroscopy
Publications per year
2009–2017
3
3
Modeling and simulation of low-energy electron scattering in organic and inorganic EUV photoresists
Alessandro Vaglio Pret, Trey Graves, David Blankenship et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 26 citations
Engineering, Electron-beam Lithography, Alternative Photoresist Platforms +24
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