Statistics
Publications
3
Citations
77
H-Index
3
Active since
2009
Affiliations
Ivo de Jong is an author at ASML (Netherlands) specializing in engineering, manufacturing engineering, and off-axis optics.
Publications per year
2009–2012
3
3
EUV lithography at chipmakers has started: performance validation of ASML's NXE:3100
Christian Wagner, Jose Bacelar, Noreen Harned et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 33 citations
Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +13
From performance validation to volume introduction of ASML's NXE platform
H. Meiling, Wim de Boeij, Frank Bornebroek et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 27 citations
Engineering, Manufacturing Engineering, Microelectromechanical Systems +8
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