Concepedia

Inwoo Chun

IC

3

Publications

128

Citations

3

H-Index

2013

Active since

Affiliations

Ivanovo State University of Chemistry and Technology(Current)

Korea University

Sungkyunkwan University

Inwoo Chun is an author at Ivanovo State University of Chemistry and Technology specializing in applied physics, engineering, and microfabrication.

Top concepts

Publications per year

2013–2015

3

Publications

3

A comparative study of CF4/O2/Ar and C4F8/O2/Ar plasmas for dry etching applications

Inwoo Chun, Alexander Efremov, Geun Young Yeom et al. · Thin Solid Films · 2015 · 93 citations

, , +7

On the LPCVD-Formed SiO2 Etching Mechanism in CF4/Ar/O2 Inductively Coupled Plasmas: Effects of Gas Mixing Ratios and Gas Pressure

Jin-Young Son, Alexander Efremov, Inwoo Chun et al. · Plasma Chemistry and Plasma Processing · 2014 · 25 citations

, , +6

Dry etching characteristics of Mo and Al2O3 films in O2/Cl2/Ar inductively coupled plasmas

Kwang‐Ho Kwon, Alexander Efremov, Sun Jin Yun et al. · Thin Solid Films · 2013 · 10 citations

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