Concepedia
Statistics
Publications
8
Citations
133
H-Index
Active since
1994
Affiliations
NEC (Japan)(Current)
Sumitomo Chemical (Japan)
Canon Anelva (Japan)
Kazumi Sugai is an author at NEC (Japan) specializing in materials science, chemical vapor deposition, and natural sciences.
Publications per year
1994–2002
Preparation of BN films by r.f. thermal plasma chemical vapour deposition
Shinya Matsumoto, Naoki Nishida, Kazuo Akashi et al. · Journal of Materials Science · 1996 · 32 citations
Natural Sciences, Materials Engineering, Materials Science +11
Aluminum chemical vapor deposition with new gas phase pretreatment using tetrakisdimethylamino-titanium for ultralarge-scale integrated-circuit metallization
Kazumi Sugai, Hirofumi Okabayashi, Tsutomu Shinzawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +13
Large scale two-step selective aluminum CVD on laser patterned palladium lines
Belgacem Haba, Kazumi Sugai, Yukio Morishige et al. · Applied Surface Science · 1994 · 17 citations
Natural Sciences, Materials Engineering, Materials Science +12
In Situ Monitoring of Al Growth in Chemical Vapor Deposition by Detecting Reflected Laser Light Intensity
Kazumi Sugai, Hidekazu Okabayashi, Tadaaki Yako et al. · Japanese Journal of Applied Physics · 1995 · 14 citations
Natural Sciences, Materials Engineering, Materials Science +17
Aluminum Metallization Using a Combination of Chemical Vapor Deposition and Sputtering
Kazumi Sugai, Shunji Kishida, Tsutomu Shinzawa et al. · Journal of The Electrochemical Society · 1997 · 13 citations
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