Tadaaki Yako

In Situ Monitoring of Al Growth in Chemical Vapor Deposition by Detecting Reflected Laser Light Intensity

Kazumi Sugai, Hidekazu Okabayashi, Tadaaki Yako et al. · Japanese Journal of Applied Physics · 1995 · 14 citations

Aluminium Nitride, Engineering, Laser Applications +17

Aluminum Metallization Using a Combination of Chemical Vapor Deposition and Sputtering

Kazumi Sugai, Shunji Kishida, Tsutomu Shinzawa et al. · Journal of The Electrochemical Society · 1997 · 13 citations

Engineering, Aluminum Films, Thin Film Process Technology +20

Determination of trace elements in trimethylgallium by electrothermal atomisation atomic absorption spectrometry and inductively coupled plasma atomic emission spectrometry

Kikuo Takeda, Masao Minobe, Takeshi Hoshika et al. · The Analyst · 1990 · 13 citations

Engineering, Atomic Emission Spectroscopy, Chemistry +16

Aluminum chemical vapor deposition reaction of dimethylaluminum hydride on TiN studied by X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry

Kozo Tanaka, H. Yanashima, Tadaaki Yako et al. · Applied Surface Science · 2001 · 12 citations

Materials Science, Chemical Engineering, Engineering +8