Concepedia

Hidekazu Okabayashi

HO

7

Publications

171

Citations

7

H-Index

1977

Active since

Affiliations

NEC (Japan)(Current)

Sumitomo Chemical (Japan)

Hidekazu Okabayashi is an author at NEC (Japan) specializing in applied physics, engineering, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMaterials EngineeringMicrofabricationChemistryElectronic PackagingPhysics

Publications per year

1977–1997

7

Publications

7

Stress-induced void formation in metallization for integrated circuits

Hidekazu Okabayashi · Materials Science and Engineering R Reports · 1993 · 85 citations

Materials Science, Electromigration Technique, Stress-induced Void Formation +8

Recent progress in refractory-metal silicide formation by ion beam mixing and its applications to VLSL

Hidekazu Okabayashi · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 19 citations

Materials Engineering, Engineering, Surface Science +8

A Self-Aligned Mo-Silicide Formation

Eiji Nagasawa, Hidekazu Okabayashi, Mitsutaka Morimoto · Japanese Journal of Applied Physics · 1983 · 16 citations

Engineering, Chemistry, Silicon On Insulator +16

In Situ Monitoring of Al Growth in Chemical Vapor Deposition by Detecting Reflected Laser Light Intensity

Kazumi Sugai, Hidekazu Okabayashi, Tadaaki Yako et al. · Japanese Journal of Applied Physics · 1995 · 14 citations

Aluminium Nitride, Engineering, Laser Applications +17

Aluminum Metallization Using a Combination of Chemical Vapor Deposition and Sputtering

Kazumi Sugai, Shunji Kishida, Tsutomu Shinzawa et al. · Journal of The Electrochemical Society · 1997 · 13 citations

Engineering, Aluminum Films, Thin Film Process Technology +20

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