Michael Larsson

Fabrication of diffractive optical elements using a single optical exposure with a gray level mask

Walter Däschner, Pin Long, Michael Larsson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 53 citations

Multilevel Doe Fabrication, Optical Materials, Engineering +22

Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step

Walter Däschner, Michael Larsson, S. H. Lee · Applied Optics · 1995 · 51 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Single photomask, multilevel kinoforms in quartz and photoresist: manufacture and evaluation

H. Andersson, Mats Ekberg, Sverker Hård et al. · Applied Optics · 1990 · 39 citations

Optical Materials, Single Photomask, Engineering +16

Improved polymer–glass adhesion through micro-mechanical interlocking

Michael Larsson, M M Ahmad · Journal of Micromechanics and Microengineering · 2006 · 33 citations

Mechanical Interlocking, Engineering, Mechanical Engineering +17

Improved adhesion in hybrid Si-polymer MEMS via micromechanical interlocking

Michael Larsson, R.R.A. Syms, Adam Wojcik · Journal of Micromechanics and Microengineering · 2005 · 31 citations

Materials Science, Si Substrate, Mechanical Interlocking +13