Concepedia

Mats Ekberg

ME

Statistics

Publications

8

Citations

211

H-Index

8

Active since

1990

Affiliations

Chalmers University of Technology(Current)

Mats Ekberg is an author at Chalmers University of Technology specializing in engineering, applied physics, and optoelectronics.

Top concepts

EngineeringApplied PhysicsOptoelectronicsMicroelectronicsMicrofabricationPhotonicsMaterial ScienceOptical MaterialsOptical PropertiesPhysics

Publications per year

1990–2001

8

Publications

8

Proximity-compensated blazed transmission grating manufacture with direct-writing, electron-beam lithography

Mats Ekberg, Fredrik Nikolajeff, Martin Larsson et al. · Applied Optics · 1994 · 46 citations

Photonics, Diffraction Efficiency, Optical Materials +15

Single photomask, multilevel kinoforms in quartz and photoresist: manufacture and evaluation

H. Andersson, Mats Ekberg, Sverker Hård et al. · Applied Optics · 1990 · 39 citations

Optical Materials, Single Photomask, Engineering +16

Multilevel phase holograms manufactured by electron-beam lithography

Mats Ekberg, B. Nilsson, Michael Larsson et al. · Optics Letters · 1990 · 26 citations

Holography, Optical Materials, Engineering +17

Successive development optimization of resist kinoforms manufactured with direct-writing, electron-beam lithography

Michael Larsson, Mats Ekberg, Fredrik Nikolajeff et al. · Applied Optics · 1994 · 25 citations

Materials Science, Engineering, Resistor +13

Measuring and modeling the proximity effect in direct-write electron-beam lithography kinoforms

Fredrik Nikolajeff, Jörgen Bengtsson, Michael Larsson et al. · Applied Optics · 1995 · 24 citations

Engineering, Electron-beam Lithography, Microscopy +16

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