Concepedia

Inho Seong

IS

7

Publications

92

Citations

7

H-Index

2021

Active since

Affiliations

Chungnam National University(Current)

Samsung (South Korea)

Inho Seong is an author at Chungnam National University specializing in microelectronics, engineering, and electrical engineering.

ORCID

Top concepts

Publications per year

2021–2023

7

Publications

7

Characterization of SiO<sub>2</sub> Over Poly-Si Mask Etching in Ar/C<sub>4</sub>F<sub>8</sub> Capacitively Coupled Plasma

Inho Seong, Jang Jae Lee, Chul‐Hee Cho et al. · Applied Science and Convergence Technology · 2021 · 25 citations · Full text

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Influence of Additive N2 on O2 Plasma Ashing Process in Inductively Coupled Plasma

Yebin You, Youngseok Lee, Sijun Kim et al. · Nanomaterials · 2022 · 14 citations · Full text

Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma

Inho Seong, Jinho Lee, Sijun Kim et al. · Nanomaterials · 2022 · 12 citations · Full text

Characterization of SiO2 Plasma Etching with Perfluorocarbon (C4F8 and C6F6) and Hydrofluorocarbon (CHF3 and C4H2F6) Precursors for the Greenhouse Gas Emissions Reduction

Minsu Choi, Youngseok Lee, Yebin You et al. · Materials · 2023 · 11 citations · Full text

Various evolution trends of sample thickness in fluorocarbon film deposition on SiO2

Youngseok Lee, Inho Seong, Jangjae Lee et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 10 citations · Full text

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