Concepedia
Author
Minsu Choi
Also Known As
Min-Su Choi, Min-su Choi, Minsu Choi
25
Publications
96
Citations
5
H-Index
0
Concepts
All Affiliations
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All Concepts
3
35
Influence of Additive N2 on O2 Plasma Ashing Process in Inductively Coupled Plasma
Yebin You, Youngseok Lee, Sijun Kim, +5
Nanomaterials
2022
14
Characterization of SiO2 Plasma Etching with Perfluorocarbon (C4F8 and C6F6) and Hydrofluorocarbon (CHF3 and C4H2F6) Precursors for the Greenhouse Gas Emissions Reduction
Minsu Choi, Youngseok Lee, Yebin You, +8
Materials
2023
11
Contribution of Ion Energy and Flux on High-Aspect Ratio SiO2 Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C4F8 Plasma: Individual Ion Energy and Flux Controlled
Wonnyoung Jeong, Sijun Kim, Youngseok Lee, +7
10
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