Statistics
Publications
2
Citations
60
H-Index
2
Active since
1999
Affiliations
Scott Gunn is an author at Sandia National Laboratories California specializing in materials science, materials engineering, and line-edge roughness.
Publications per year
1999–2002
2
2
Photospeed considerations for extreme ultraviolet lithography resists
Paul M. Dentinger, Luke Hunter, Donna J. O’Connell et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 20 citations
Natural Sciences, Materials Engineering, Materials Science +13
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