Jun-ichi Uegaki

Micro Press Molding of Borosilicate Glass Using Plated Ni–W Molds

Manabu Yasui, Masaharu Takahashi, Satoru Kaneko et al. · Japanese Journal of Applied Physics · 2007 · 29 citations

Engineering, Materials Engineering, Materials Science +15

Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold

Harutaka Mekaru, Tomoyuki Tsuchida, Jun-ichi Uegaki et al. · Microelectronic Engineering · 2008 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +7

Development of Ni–P-Plated Inconel Alloy Mold for Imprinting on Pyrex Glass

Harutaka Mekaru, Chieko Okuyama, Tomoyuki Tsuchida et al. · Japanese Journal of Applied Physics · 2009 · 12 citations

Engineering, Materials Engineering, Materials Science +15

Fabrication of Glassy Carbon Molds Using Hydrogen Silsequioxane Patterned by Electron Beam Lithography as O₂ Dry Etching Mask

Manabu Yasui, Yoshinari Sugiyama, Masaharu Takahashi et al. · Japanese Journal of Applied Physics · 2008 · 12 citations

Engineering, Materials Engineering, Materials Science +17