Concepedia

Yoshinari Sugiyama

YS

6

Publications

183

Citations

6

H-Index

2003

Active since

Affiliations

The University of Tokyo(Current)

Japan Science and Technology Agency

Toyo University

Yoshinari Sugiyama is an author at The University of Tokyo specializing in engineering, materials science, and microfabrication.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMicrofabricationSurface ScienceMicroelectronicsNanomanufacturingLaser ApplicationsMaterials FabricationNanomaterials

Publications per year

2003–2017

6

Publications

6

Deep dry etching of borosilicate glass using fluorine-based high-density plasmas for microelectromechanical system fabrication

Takanori Ichiki, Yoshinari Sugiyama, Takekazu Ujiie et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 55 citations

Materials Science, Glass-ceramic, Engineering +13

Plasma applications for biochip technology

Takanori Ichiki, Yoshinari Sugiyama, Riko Taura et al. · Thin Solid Films · 2003 · 54 citations

Electrical Engineering, Plasma Applications, Instrumentation +3

Fabrication of Non Reflective Structure on Glassy Carbon Surface Using Oxygen Ion Beam Irradiation

Jun Taniguchi, Yoshimi Nemoto, Yoshinari Sugiyama · Journal of Nanoscience and Nanotechnology · 2009 · 31 citations

Materials Science, Materials Engineering, Ion Implantation +15

Surface finish of micro punch with ion beam irradiation

Jie Xu, Chunju Wang, Bin Guo et al. · Transactions of Nonferrous Metals Society of China · 2009 · 18 citations

Materials Science, Ion Implantation, Engineering +5

Silica imprint templates with concave patterns from single-digit nanometers fabricated by electron beam lithography involving argon ion beam milling

Shunya Ito, Eri Kikuchi, Masahiko Watanabe et al. · Japanese Journal of Applied Physics · 2017 · 13 citations

Engineering, Electron-beam Lithography, Ion Implantation +24

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