Concepedia

Author

Yoshinari Sugiyama

The University of Tokyo

Also Known As

Y. SUGIYAMA, Y. Sugiyama, Yoshinari Sugiyama

23

Publications

218

Citations

7

H-Index

24

Concepts

All Affiliations

The University of TokyoJapan Science and Technology AgencyToyo University
YS

About

Yoshinari Sugiyama is an author at The University of Tokyo specializing in engineering, materials science, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

129

2

Applied Physics

4

4

111

3

Chemical Engineering

1

1

12

4

Electrical Engineering

1

1

54

5

Materials Engineering

1

1

31

Yoshinari Sugiyama

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6

Publications

183

Citations

6

H-Index

YearCitations

Deep dry etching of borosilicate glass using fluorine-based high-density plasmas for microelectromechanical system fabrication

Takanori Ichiki, Yoshinari Sugiyama, Takekazu Ujiie,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2003

55

Plasma applications for biochip technology

Takanori Ichiki, Yoshinari Sugiyama, Riko Taura,

Thin Solid Films

2003

54

Fabrication of Non Reflective Structure on Glassy Carbon Surface Using Oxygen Ion Beam Irradiation

Jun Taniguchi, Yoshimi Nemoto, Yoshinari Sugiyama

Journal of Nanoscience and Nanotechnology

2009

31

Surface finish of micro punch with ion beam irradiation

Jie Xu, Chunju Wang, Bin Guo,

Transactions of Nonferrous Metals Society of China

2009

18

Silica imprint templates with concave patterns from single-digit nanometers fabricated by electron beam lithography involving argon ion beam milling

Shunya Ito, Eri Kikuchi, Masahiko Watanabe,

Japanese Journal of Applied Physics

2017

13

Fabrication of Glassy Carbon Molds Using Hydrogen Silsequioxane Patterned by Electron Beam Lithography as O<sub>2</sub> Dry Etching Mask

Manabu Yasui, Yoshinari Sugiyama, Masaharu Takahashi,

Japanese Journal of Applied Physics

2008

12

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