Masaharu Takahashi

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Active since

2008

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Masaharu Takahashi is an author at National Institute of Advanced Industrial Science and Technology specializing in etching, materials engineering, and engineering.

Publications per year

2008–2008

Publications

Room-Temperature Bonding of Oxide Wafers by Ar-beam Surface Activation

Hideki Takagi, Jun Utsumi, Masaharu Takahashi et al. · ECS Transactions · 2008 · 23 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication of Glassy Carbon Molds Using Hydrogen Silsequioxane Patterned by Electron Beam Lithography as O<sub>2</sub> Dry Etching Mask

Manabu Yasui, Yoshinari Sugiyama, Masaharu Takahashi et al. · Japanese Journal of Applied Physics · 2008 · 12 citations

Engineering, Materials Engineering, Materials Science +17

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