Chieko Okuyama

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Active since

2007

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Chieko Okuyama is an author at National Institute of Advanced Industrial Science and Technology specializing in microfabrication materials, engineering, and materials science.

Publications per year

2007–2012

Publications

A study on fabrication of silicon mold for polymer hot-embossing using focused ion beam milling

Sung-Won Youn, Chieko Okuyama, Masaharu Takahashi et al. · Journal of Materials Processing Technology · 2007 · 24 citations

Engineering, Manufacturing Engineering, Materials Science +15

Development of Ni–P-Plated Inconel Alloy Mold for Imprinting on Pyrex Glass

Harutaka Mekaru, Chieko Okuyama, Tomoyuki Tsuchida et al. · Japanese Journal of Applied Physics · 2009 · 12 citations

Engineering, Materials Engineering, Materials Science +15

Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologies

Harutaka Mekaru, Chieko Okuyama, Akihisa Ueno · Microsystem Technologies · 2012 · 11 citations

Engineering, Materials Engineering, Materials Science +13

Thermal imprinting on quartz fiber using glasslike carbon mold

Harutaka Mekaru, Chieko Okuyama, Akihisa Ueno et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 10 citations

Engineering, Materials Engineering, Materials Science +17

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