Akihisa Ueno

Statistics

Publications

Citations

H-Index

Active since

2008

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Akihisa Ueno is an author at National Institute of Advanced Industrial Science and Technology specializing in microfabrication, engineering, and materials engineering.

Publications per year

2008–2012

Publications

Microstructuring of SU-8 photoresist by UV-assisted thermal imprinting with non-transparent mold

Sung-Won Youn, Akihisa Ueno, Masaharu Takahashi et al. · Microelectronic Engineering · 2008 · 21 citations

Engineering, Materials Engineering, Materials Science +11

Inclination of mold pattern’s sidewalls by combined technique with photolithography at defocus-positions and electroforming

Harutaka Mekaru, Osamu Koizumi, Akihisa Ueno et al. · Microsystem Technologies · 2009 · 16 citations

Engineering, Manufacturing Engineering, Materials Engineering +9

A process of glassy carbon etching without the micro masking effect for the fabrication of a mold with a high-quality surface

Sung-Won Youn, Akihisa Ueno, Masaharu Takahashi et al. · Journal of Micromechanics and Microengineering · 2009 · 16 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologies

Harutaka Mekaru, Chieko Okuyama, Akihisa Ueno · Microsystem Technologies · 2012 · 11 citations

Engineering, Materials Engineering, Materials Science +13

Thermal imprinting on quartz fiber using glasslike carbon mold

Harutaka Mekaru, Chieko Okuyama, Akihisa Ueno et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 10 citations

Engineering, Materials Engineering, Materials Science +17

1–5 of 5