Ziad El Otell - Concepedia

Author

Ziad El Otell

IMEC ORCID

Also Known As

Z el Otell, Z. el Otell, Ziad El Otell, Ziad el Otell, el Otell, Ziad

Publications

164

Citations

H-Index

Concepts

All Affiliations

IMEC KU Leuven Lomonosov Moscow State University

About

Ziad El Otell is an author at IMEC specializing in engineering, applied physics, and plasma theory.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	76
2	Natural Sciences	3	3	44
3	Applied Physics	3	3	53
4	Chemistry	3	3	42
5	Chemical Engineering	1	1	12

Ziad El Otell

Publications

125

Citations

H-Index

Page 1

	Year	Citations
Improved Plasma Resistance for Porous Low-k Dielectrics by Pore Stuffing Approach Liping Zhang, Jean‐François de Marneffe, Markus Heyne, ECS Journal of Solid State Science and Technology	2014	35
Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics Jean‐François de Marneffe, L. Zhang, Markus Heyne, Journal of Applied Physics EngineeringVacuum Ultra-violet DamageNanoporous MaterialGlass MaterialVacuum Device	2015	23
Comparison of vacuum ultra-violet emission of Ar/CF<sub>4</sub>and Ar/CF<sub>3</sub>I capacitively coupled plasmas A I Zotovich, Ziad El Otell, D. V. Lopaev, Plasma Sources Science and Technology EngineeringGlow DischargePlasma PhysicsChemistryPlasma Electronics	2016	16
Multi-photon and electron impact ionisation studies of reactivity in adenine–water clusters B. Barc, M. Ryszka, Jean‐Christophe Poully, International Journal of Mass Spectrometry Cluster ScienceAdenine–water ClustersPhotochemistryPhysicsNatural Sciences	2014	14
Vacuum ultra-violet emission of CF<sub>4</sub>and CF<sub>3</sub>I containing plasmas and Their effect on low-k materials Ziad El Otell, Vladimir Šamara, A I Zotovich, Journal of Physics D Applied Physics EngineeringPlasma PhysicsPlasma ProcessingLow-k MaterialsSpace Plasma Physics	2015	14
Impact of sequential infiltration synthesis on pattern fidelity of DSA lines Arjun Singh, W. Knaepen, Şafak Sayan, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Bcp SystemsEngineeringChemistryChemical EngineeringPattern Fidelity	2015	12
Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma Daniil Marinov, Ziad El Otell, M. Bowden, Plasma Sources Science and Technology EngineeringPlasma SciencePlasma PhysicsNegative Ion BeamsIon Process	2015	11

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