Ziad El Otell

Improved Plasma Resistance for Porous Low-k Dielectrics by Pore Stuffing Approach

Liping Zhang, Jean‐François de Marneffe, Markus Heyne et al. · ECS Journal of Solid State Science and Technology · 2014 · 35 citations

Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics

Jean‐François de Marneffe, L. Zhang, Markus Heyne et al. · Journal of Applied Physics · 2015 · 23 citations

Engineering, Vacuum Ultra-violet Damage, Nanoporous Material +17

Comparison of vacuum ultra-violet emission of Ar/CF₄and Ar/CF₃I capacitively coupled plasmas

A I Zotovich, Ziad El Otell, D. V. Lopaev et al. · Plasma Sources Science and Technology · 2016 · 16 citations

Engineering, Glow Discharge, Plasma Physics +21

Multi-photon and electron impact ionisation studies of reactivity in adenine–water clusters

B. Barc, M. Ryszka, Jean‐Christophe Poully et al. · International Journal of Mass Spectrometry · 2014 · 14 citations

Cluster Science, Adenine–water Clusters, Photochemistry +7

Vacuum ultra-violet emission of CF₄and CF₃I containing plasmas and Their effect on low-k materials

Ziad El Otell, Vladimir Šamara, A I Zotovich et al. · Journal of Physics D Applied Physics · 2015 · 14 citations

Engineering, Plasma Physics, Plasma Processing +21