Statistics
Publications
3
Citations
48
H-Index
3
Active since
2004
Affiliations
Infineon Technologies (Germany)(Current)
Kevin A. Pears is an author at Infineon Technologies (Germany) specializing in materials science, materials engineering, and etching processes.
Publications per year
2004–2005
3
3
Carbon hard masks for etching sub-90nm structures
Kevin A. Pears, M. Stavrev, Alessia Scire et al. · Microelectronic Engineering · 2005 · 11 citations
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