Statistics
Publications
1
Citations
11
H-Index
1
Active since
2005
Affiliations
Infineon Technologies (Germany)(Current)
Alessia Scire is an author at Infineon Technologies (Germany) specializing in microfabrication, hard carbon, and etching processes.
Publications per year
2005–2005
1
1
Carbon hard masks for etching sub-90nm structures
Kevin A. Pears, M. Stavrev, Alessia Scire et al. · Microelectronic Engineering · 2005 · 11 citations
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