Concepedia

Kaushik Sah

KS

3

Publications

39

Citations

3

H-Index

2016

Active since

Affiliations

IMEC(Current)

Kaushik Sah is an author at IMEC specializing in defect tolerance, microelectronics, and instrumentation.

ORCID

Top concepts

Publications per year

2016–2020

3

Publications

3

Process window discovery methodology development for advanced lithography

Dieter Van den Heuvel, Philippe Foubert, Bart Baudemprez et al. · 2016 · 14 citations

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Inspection of Stochastic Defects With Broadband Plasma Optical Systems for Extreme Ultraviolet (EUV) Lithography

Kaushik Sah, Sandip Halder, Andrew Cross et al. · IEEE Transactions on Semiconductor Manufacturing · 2020 · 13 citations

, , +19

EUV stochastic defect monitoring with advanced broadband optical wafer inspection and e-beam review systems

Kaushik Sah, Andrew Cross, M. Plihal et al. · 2018 · 12 citations

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