Concepedia

Alexander Philippou

AP

2

Publications

46

Citations

2

H-Index

2007

Active since

Affiliations

Synopsys (Belgium)(Current)

Alexander Philippou is an author at Synopsys (Belgium) specializing in engineering, electronic packaging, and calibration.

Top concepts

EngineeringPlasticity3D PrintingCalibrationMeasurementApplied PhysicsPolymer ScienceMaterial ScienceMicroelectronicsMicrofabrication

Publications per year

2007–2012

2

Publications

2

Calibration and verification of a stochastic model for EUV resist

Weimin Gao, Alexander Philippou, Ulrich Klostermann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 30 citations

Engineering, Electron-beam Lithography, Measurement +19

Impact of photoresist composition and polymer chain length on line edge roughness probed with a stochastic simulator

Alexander Philippou · Journal of Micro/Nanolithography MEMS and MOEMS · 2007 · 16 citations

Materials Science, Engineering, Mechanical Engineering +11

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