Concepedia

Akira Sumitani

AS

Statistics

Publications

15

Citations

449

H-Index

12

Active since

1988

Affiliations

Komatsu (Japan)(Current)

Utsunomiya University

Akira Sumitani is an author at Komatsu (Japan) specializing in laser-plasma interactions, natural sciences, and plasma physics.

Publications per year

1988–2013

15

Publications

15

Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target

Yoshifumi Ueno, Georg Soumagne, Akira Sumitani et al. · Applied Physics Letters · 2007 · 85 citations

, , +10

First generation laser-produced plasma source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 51 citations

, , +12

Reduction of debris of a CO2 laser-produced Sn plasma extreme ultraviolet source using a magnetic field

Yoshifumi Ueno, Georg Soumagne, Akira Sumitani et al. · Applied Physics Letters · 2008 · 44 citations

, , +10

Laser produced EUV light source development for HVM

Akira Endo, Hideo Hoshino, Takashi Suganuma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 41 citations

, , +12

100W 1st generation laser-produced plasma light source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 38 citations

, , +9

1–5 of 15