Concepedia

Maurice Kahn

MK

2

Publications

64

Citations

2

H-Index

2007

Active since

Affiliations

Laboratoire des Technologies de la Microélectronique(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Laboratoire d'Électronique des Technologies de l'Information

CEA Grenoble

Centre National de la Recherche Scientifique

Maurice Kahn is an author at Laboratoire des Technologies de la Microélectronique specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

2007–2009

2

Publications

2

Physicochemical and electrical characterizations of atomic layer deposition grown HfO2 on TiN and Pt for metal-insulator-metal application

Corentin Jorel, C. Vallée, E. Gourvest et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 38 citations · Full text

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Improved electrical properties using SrTiO3/Y2O3 bilayer dielectrics for MIM capacitor applications

Maurice Kahn, C. Vallée, Emmanuel Defaÿ et al. · Microelectronics Reliability · 2007 · 26 citations

, , +8

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