Wanxue Zeng

Publications

Citations

H-Index

2000

Active since

Affiliations

University at Albany, State University of New York(Current)

Wanxue Zeng is an author at University at Albany, State University of New York specializing in engineering, applied physics, and chemical engineering.

Top concepts

EngineeringApplied PhysicsThin FilmsSurface ScienceMaterial ScienceMicroelectronicsChemical EngineeringNanoelectronicsElectrochemistryMaterials Engineering

Publications per year

2000–2008

Publications

High aspect ratio Bosch etching of sub-0.25μm trenches for hyperintegration applications

Xiaodong Wang, Wanxue Zeng, Guoping Lu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 31 citations

Electrical Engineering, Wafer Scale Processing, Engineering +14

CVD of Tantalum Oxide Dielectric Thin Films for Nanoscale Device Applications

Wanxue Zeng, Eric Eisenbraun, H. L. Frisch et al. · Journal of The Electrochemical Society · 2004 · 21 citations

Engineering, Thin Film Process Technology, Vacuum Device +18

Low temperature inorganic chemical vapor deposition of Ti–Si–N diffusion barrier liners for gigascale copper interconnect applications

Eric Eisenbraun, A. Upham, Raj Kishora Dash et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 20 citations · Full text

Engineering, Thin Film Process Technology, Chemical Deposition +16

Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications

Steven Consiglio, Wanxue Zeng, N. Berliner et al. · Journal of The Electrochemical Society · 2008 · 18 citations

Engineering, Carbon Incorporation, Chemical Deposition +19

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